Sputtering Targets

ADVANTAGES

High purity, texture and grain size controlled, high density & low defects.

H.C. Starck Solutions is well-known as a major international producer of tantalum products for the electronic, semiconductor and industrial markets.

APPLICATION

Semiconductor, Flat Panel Display, Other Electronics

MARKET SEGMENT

Electronics

MATERIALS

Ta, Mo, Mo EBM, DynaMo, MoTi, MoNb, MoW, Arc-cast Mo, coated Mo, Nb Standard, grain stabil. Mo, Ta EBM, W

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


 

Sputtering Targets

Tantalum ingots, used in the production of tantalum sputtering targets, are electron beam (EB) melted, and have inherently high purity due to a combination of high vacuum settings, slow melting rates, multiple furnace passes, and careful control of all aspects of the process.

Application

Tantalum sputtering targets make thin coatings via a sputtering process for copper interconnect metallization, magnetic recording media, printer components, flat panel displays, optical and industrial glass, and thin film resistors.

Dimensions

H.C. Starck Solutions supplies both blanks and finished tantalum plates to manufacturers of sputtering targets. These targets meet exacting standards of purity and dimensional tolerances. Target blank sizes range from small research cathodes to large 100 pound planar targets. Typical thicknesses include .2″ to .7″, but thickness can be up to 1.5″ and greater. Typical diameters are 3″ to 18″. Typical rectangles are 6″ to 30″ or larger based on customer needs.

Typical Tantalum Properties

H.C. Starck Solutions offers a variety of options for texture controlled plates that lead to uniform thin film deposition characteristics throughout the target life.

Electron beam (EB) melted, cross rolled, rolled and annealed:

Density: 0.6 lb/in3 or 16.6 g/cm3
Atomic Number: 73
Atomic Weight: 180.95
Purity: See chemistries below:

Elements 3N5 Purity
99.95% Ta
3N8 Purity
99.98% Ta
4N Purity
99.99% Ta
4N5 Purity
99.995% Ta
Max. ppm Max. ppm Max. ppm Max ppm.
Al 10 5 1 0,5
Ca 10 5 1 1
Cl 3 3 1 1
Co 10 5 1 0,5
Cr 10 5 1 0,5
Cu 5 5 1 0,5
Fe 50 20 5 1
K 2 2 0,4 0,1
Li 1 1 0,5 0,05
Mg 10 5 1 0,5
Mn 10 5 1 0,5
Mo 50 20 10 10
Na 1 1 0,4 0,4
Nb 300 100 100 50
Ni 20 10 5 1
Pb 5 5 1 1
Si 10 10 1 0,5
Sn 10 5 1 1
Ti 10 5 1 1
V 5 5 1 1
W 150 100 80 50
Zn 5 5 1 1
Zr 20 10 5 1
Max Total
Detectable Metallics

500

200
100 50
INTERSTITIALS
C 40 40 30 30
O 100 100 80 80
H 10 10 10 5
N 40 20 20 20
S 10 10 5 1

Tolerances

Thickness: 
Rolled and leveled plates have a normal thickness tolerance of ± 5% which can be tightened to ± .010″ at an added cost, depending on dimensions required.

Flatness: 
.005″ – .010″ TIR, depending on size and thickness

Grain Size: 
ASTM 4 or finer for targets made from plates under .4″ thick.

High Purity Tantalum Chemistries

There is a choice of purity levels with different prices and availability. Purity is measured by DC Plasma and gasses are measured by Leco analyzers. More detailed testing by GDMS (Glow Discharge Mass Spectrometry) is available.

Conflict-free, Sustainable Tantalum Supply

H.C. Starck Solutions only processes raw materials from ethically acceptable, conflict-free sources. This also applies for the procurement and processing of tantalum. We only purchase raw materials that meet the specifications of the OECD (“Due Diligence Guidelines for Supply Chains of Minerals from Conflict-Affected and High-Risk Areas”). Our company and its tantalum processing sites are certified in the context of the Conflict-Free Smelter (CFS) Validation Program of the independent Electronics Industry.

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Hot Zones

ADVANTAGES

These high temperature materials are characterized by their high thermal and electrical conductivity, low coefficient of thermal expansion, and excellent strength and stability at temperatures above 2,000°C.

APPLICATION

High Temperature Processing

MARKET SEGMENT

Industrial Processing

MATERIALS

Mo30W, MoCu, TZM, MoTi, MoLa, MoW, Ta, EBM Ta, Ulta76, Ultra 76 Plus, TaW, W, WHA

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


 

Hot Zones

The furnace industry has seen a remarkable growth in the production of custom-made, high temperature vacuum or controlled (inert) atmosphere furnaces for growing sapphire crystals used in manufacturing of LEDs. These furnaces have unique and demanding hot zone designs for melting alumina in crucibles for precise, highly controlled crystal growth.

The hot zones in sapphire growing furnaces and sapphire annealing/post processing use H.C. Starck Solutions molybdenum and tungsten materials and fabricated products for furnace components and fixtures.

Molybdenum and Tungsten Hot Zones

These high temperature materials are characterized by their high thermal and electrical conductivity, low coefficient of thermal expansion, and excellent strength and stability at temperatures above 2,000°C.

Whether by KY, EFG, CZ, or HEM-like methods (GTAT, CHES, and VHGF) or post processing annealing, H.C. Starck Solutions is well versed in these different sapphire crystal growth and processing methods and supplies engineered product solutions for all technology platforms.

Customer specific furnace components and fixtures for high temperature furnaces are uniquely designed and supplied by H.C. Starck Solutions.

 

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Heating Elements

ADVANTAGES

Our innovative materials improve cycle-time and maintain temperature uniformity with no carbon contamination, less rejection of components, better handling and reduced production cost compared to graphite and ceramics for a wide spectrum of metal injection molding applications. Recrystallization and High-Temperature Warpage Resistance. MoLa alloys have great formability at all grade levels when compared to pure molybdenum in the same condition.

APPLICATION

Heat Management

MARKET SEGMENT

Industrial Processing

MATERIALS

Mo30W, MoCu, TZM, MoTi, MoLa, MoW, Ta, EBM Ta, Ulta76, Ultra 76 Plus, TaW, W, (W, Ni, Fe)

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


 

Heating Elements

H.C. Starck Solutions molybdenum is a superior, pure and alloyed refractory material for heat treating medical, aerospace, defense and automotive products in high temperature furnaces that include medical devices, aircraft and aerospace components, nuclear fuel pellet production, and high pulse magnet research applications. Our innovative materials improve cycle-time and maintain temperature uniformity with no carbon contamination, less rejection of components, better handling and reduced production cost compared to graphite and ceramics for a wide spectrum of metal injection molding applications.

For higher temperature heat treating applications such as hardening or brazing, molybdenum is the preferred heating element material. For specialized heat-treating applications above 1,482 °C (2,700 °F), refractory metals such as molybdenum, tantalum or tungsten are good choices. Other processes such as low pressure vacuum carburizing use graphite or silicon carbide elements.

Almost all high-temperature vacuum furnaces are electrically heated. Resistance heating elements are constructed from refractory metals in a variety of styles. Today all high-tech metallurgy technology operates in vacuum atmosphere with high temperatures from 1,150 oC up to 2,800 oC.

Recrystallization and High-Temperature Warpage Resistance

Molybdenum-lanthana (MoLa) alloys are one type of oxide-dispersion strengthened (ODS) molybdenum containing molybdenum and a very fine array of lanthanum trioxide particles. This combination creates extraordinary characteristics of the material, which demonstrate resistance to recrystallization as well as high-temperature warpage. Molybdenum-lanthana is an ideal material for applications requiring dimensional stability and strength at temperatures above the capabilities of either pure molybdenum or molybdenum TZM alloy.

H.C. Starck Solutions manufactures MoLa alloys in three levels of doping with lanthanum trioxide: 0.3 weight %, 0.6 weight % and 1.1 weight %. The trioxide particles stabilize the grain structure of the material creating very beneficial high temperature performance. The unique H.C. Starck Solutions doping process of introducing the oxide particles to the molybdenum matrix is key to the excellent properties obtained, and differentiates H.C. Starck Solutions from other manufacturers of similar materials. In addition, the doping process maximizes the homogeneity of the lanthanum oxide dispersed in the molybdenum matrix.

Benefits of H.C. Starck Solutions MoLa Alloys

MoLa alloys have great formability at all grade levels when compared to pure molybdenum in the same condition. Pure molybdenum recrystallizes at approximately 1,200 °C and becomes very brittle with less than 1 % elongation, which makes it not formable in this condition.

MoLa alloys in plate and sheet forms perform better than pure molybdenum and TZM for high temperature applications. That is above 1,100 °C for molybdenum and above 1,500 °C for TZM. The maximum advisable temperature for MoLa is 1,900 °C, due to the release of lanthana particles from the surface at higher than 1,900 °C temperature.

The “best value” MoLa alloy is the one containing 0.6 wt % lanthana. It exhibits the best combination of properties. Low lanthana MoLa alloy is an equivalent substitute for pure Mo in the temperature range of 1,100 °C – 1,900 °C. The advantages of high lanthana MoLa, like superior creep resistance, are only realized, if the material is recrystallized prior to use at high temperatures.

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Furnace Boats

ADVANTAGES

Refractory furnace boats are widely employed to house intermediate or finished goods when they are subjected to high-temperature processes such as annealing and sintering. These containers are engineered for excellent dimensional stability, retaining their shape at ambient and process temperatures with good resistance to creep deformation to ensure long-service over multiple processing cycles in heat treatment applications.

APPLICATION

High Temperature Processing

MARKET SEGMENT

Industrial Processing

MATERIALS

Mo30W, MoCu, TZM, MoTi, MoLa, MoW, Ta, EBM Ta, Ulta76, Ultra 76 Plus, TaW, W, (W, Ni, Fe)

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


H.C. Starck Solutions has almost 100 years’ experience in the development of furnace assemblies and components with superb refractory metals and alloys.

H.C. Starck Solutions key materials in furnace boat manufacturing include, but are not limited to:

  • Pure Molybdenum (Mo) and alloys such as arc-cast molybdenum 30% tungsten (Mo30W), molybdenum-lanthanum (MoLa), molybdenum-tungsten (MoW), and titanium-zirconium-molybdenum (TZM).
  • Pure and electron beam melted (EBM) tantalum (Ta) and its alloys such as Ultra 76, Ultra 76 Plus, and tantalum-tungsten (TaW).
  • Tungsten (W).

Refractory Furnace Boats for Thermal Processing

Whether customers are looking to process large components in high-temperature vacuum furnaces, run large-volume production for brazing parts in inert atmosphere furnaces, or anneal highly-regulated end-products to critical specifications, H.C. Starck Solutions can provide value-added product solutions. With a wide choice of refractory metals and technical alloys available for manufacturing furnace boats to custom specifications and geometries, H.C. Starck Solutions can reliably provide containment products for thermal processing in a choice of demanding application areas.

Molybdenum is the material of choice for furnace boat manufacturing, with exceptional retention of its mechanical properties at continuous annealing temperatures exceeding 800°C (1472°F). This applies for various molybdenum alloys, including specialty TZM. H.C. Starck Solutions designs furnace boats to satisfy specific application requirements and can provide novel material solutions with distinct considerations for low adhesion, abrasiveness, chemical cross-reactivity, and more.

If you would like to discuss the fabrication of tailored furnace boats for your furnace application and design, simply contact a member of the H.C. Starck Solutions team today with your query.

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Evaporation Boats

ADVANTAGES

APPLICATION

High Temperature Processing

MARKET SEGMENT

Industrial Processing

MATERIALS

Mo, Mo30W, TZM, MoLa, MoW, Ta, W

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


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