Sputtering Targets

ADVANTAGES

High purity, texture and grain size controlled, high density & low defects.

H.C. Starck Solutions is well-known as a major international producer of tantalum products for the electronic, semiconductor and industrial markets.

APPLICATION

Semiconductor, Flat Panel Display, Other Electronics

MARKET SEGMENT

Electronics

MATERIALS

Ta, Mo, Mo EBM, DynaMo, MoTi, MoNb, MoW, Arc-cast Mo, coated Mo, Nb Standard, grain stabil. Mo, Ta EBM, W

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


 

Sputtering Targets

Tantalum ingots, used in the production of tantalum sputtering targets, are electron beam (EB) melted, and have inherently high purity due to a combination of high vacuum settings, slow melting rates, multiple furnace passes, and careful control of all aspects of the process.

Application

Tantalum sputtering targets make thin coatings via a sputtering process for copper interconnect metallization, magnetic recording media, printer components, flat panel displays, optical and industrial glass, and thin film resistors.

Dimensions

H.C. Starck Solutions supplies both blanks and finished tantalum plates to manufacturers of sputtering targets. These targets meet exacting standards of purity and dimensional tolerances. Target blank sizes range from small research cathodes to large 100 pound planar targets. Typical thicknesses include .2″ to .7″, but thickness can be up to 1.5″ and greater. Typical diameters are 3″ to 18″. Typical rectangles are 6″ to 30″ or larger based on customer needs.

Typical Tantalum Properties

H.C. Starck Solutions offers a variety of options for texture controlled plates that lead to uniform thin film deposition characteristics throughout the target life.

Electron beam (EB) melted, cross rolled, rolled and annealed:

Density: 0.6 lb/in3 or 16.6 g/cm3
Atomic Number: 73
Atomic Weight: 180.95
Purity: See chemistries below:

Elements 3N5 Purity
99.95% Ta
3N8 Purity
99.98% Ta
4N Purity
99.99% Ta
4N5 Purity
99.995% Ta
Max. ppm Max. ppm Max. ppm Max ppm.
Al 10 5 1 0,5
Ca 10 5 1 1
Cl 3 3 1 1
Co 10 5 1 0,5
Cr 10 5 1 0,5
Cu 5 5 1 0,5
Fe 50 20 5 1
K 2 2 0,4 0,1
Li 1 1 0,5 0,05
Mg 10 5 1 0,5
Mn 10 5 1 0,5
Mo 50 20 10 10
Na 1 1 0,4 0,4
Nb 300 100 100 50
Ni 20 10 5 1
Pb 5 5 1 1
Si 10 10 1 0,5
Sn 10 5 1 1
Ti 10 5 1 1
V 5 5 1 1
W 150 100 80 50
Zn 5 5 1 1
Zr 20 10 5 1
Max Total
Detectable Metallics

500

200
100 50
INTERSTITIALS
C 40 40 30 30
O 100 100 80 80
H 10 10 10 5
N 40 20 20 20
S 10 10 5 1

Tolerances

Thickness: 
Rolled and leveled plates have a normal thickness tolerance of ± 5% which can be tightened to ± .010″ at an added cost, depending on dimensions required.

Flatness: 
.005″ – .010″ TIR, depending on size and thickness

Grain Size: 
ASTM 4 or finer for targets made from plates under .4″ thick.

High Purity Tantalum Chemistries

There is a choice of purity levels with different prices and availability. Purity is measured by DC Plasma and gasses are measured by Leco analyzers. More detailed testing by GDMS (Glow Discharge Mass Spectrometry) is available.

Conflict-free, Sustainable Tantalum Supply

H.C. Starck Solutions only processes raw materials from ethically acceptable, conflict-free sources. This also applies for the procurement and processing of tantalum. We only purchase raw materials that meet the specifications of the OECD (“Due Diligence Guidelines for Supply Chains of Minerals from Conflict-Affected and High-Risk Areas”). Our company and its tantalum processing sites are certified in the context of the Conflict-Free Smelter (CFS) Validation Program of the independent Electronics Industry.

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Plated and Stamped Components

ADVANTAGES

High degree of biocompatibility

APPLICATION

Semiconductor, Chemical Processing Equipment, Heat Management

MARKET SEGMENT

Industrial Processing, Electronics, Aerospace & Defense

MATERIALS

Mo, CuMoCu, MoCu, NiMoNi

H.C. Starck Solutions electroplating capabilities add value to our thermal management components. We have one of the largest electroplating facilities specializing in ruthenium, rhodium, silver, gold, electroless and electrolytic nickel coatings. Various techniques are available, including PVD for single or double-sided coating, rack or barrel plating, enabling complete and comprehensive part size flexibility in addition to volume management capability – from a single component to multi-batch. Specialty coatings with Ni, Au, Ag, Ru, Rh, Pt are available for solder-wetting, etch-resistance, protective layers, and electrical contacts.

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


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Crucibles

ADVANTAGES

Low thermal creep, low reactivity with melt (contamination), high temperature strength, good thermal conductivity.

  • excellent thermal shock and corrosion resistance
  • very low wettability of non ferrous metal melts
  • increased productivity
  • reduction of machine down time

APPLICATION

Semiconductor, Chemical Processing Equipment

MARKET SEGMENT

Electronics, Industrial Processing

MATERIALS

Mo, TZM, MoLa, Ta, W

REQUEST A QUOTE

Please fill in the boxes on the contact form and a member of the team will contact you directly for a quotation.

Each quotation will be unique to the customer requirements so please give as much information in the contact form as possible, this will enable us to get the most accurate price back to you.


Crucibles

H.C. Starck Solutions produces high tech ceramics StarCeram® A, StarCeram® AT and StarCeram® S. All materials are characterised by excellent thermal shock and corrosion resistance as well as very low wettability of non ferrous metal melts. Aluminum Titanate shows excellent insulating properties. To meet our customers requirements, we offer combined development- and design engineering work. Furthermore we provide an opportunity for the manufacture of prototypes as well as the production of single parts and small batches.

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